Carbon tetrafluoride, also known as tetrafluoromethane, Freon-14 and R 14, is a halogenated hydrocarbon (chemical formula: CF4). It can be considered as a halogenated hydrocarbon, halomethane, perfluorocarbon, or an inorganic compound. At minus 198 ° C, carbon tetrafluoride has a monoclinic structure with a lattice constant of a = 8.597, b = 4.433, c = 8.381 (.10-1 nm), and β = 118.73 °.
Precautions for storage: Store in a cool, ventilated, non-combustible gas warehouse. Keep away from fire and heat sources. The storage temperature should not exceed 30 ℃. It should be stored separately from flammable and combustible materials and oxidants. The storage area should be equipped with emergency response equipment.
1. Carbon tetrafluoride is sometimes used as a low temperature coolant. It can be used in the manufacture of circuit boards, as well as in the manufacture of insulating substances and semiconductors. It is used as a gas etchant and plasma etch plate.
2. Carbon tetrafluoride is currently the largest amount of plasma etching gas in the microelectronics industry. Its high purity gas and a mixture of high purity carbon tetrafluoride gas and high purity oxygen can be widely used in silicon, silicon dioxide, nitrogen Etching of silicon silicon, phosphosilicate glass and tungsten thin film materials. For silicon and silicon dioxide systems, when CF4-H2 reactive ion etching is used, by adjusting the ratio of the two gases, a selectivity of 45: 1 can be obtained, which is very important when etching silicon dioxide films on polysilicon gates. it works.
3. It is also widely used in electronic device surface cleaning, solar cell production, laser technology, gas phase insulation, low temperature refrigeration, leak detection agent, control of space rocket attitude, and detergent in printed circuit production.
4. Due to its strong chemical stability, CF4 can also be used in metal smelting and plastic industries.
5. Carbon fluoride has good dissolved oxygen, so it is used by scientists to replace ordinary compressed air for ultra-deep diving experiments. At present, mice have been successful. At a depth of 275 to 366 meters, mice can still safely escape.